Synthesis and Exploratory Deposition Studies of Isotetrasilane and Reactive Intermediates for Epitaxial Silicon

Inorganic Chemistry
Barry ArklesAlain Kaloyeros

Abstract

A synthetic method is presented for the production of isotetrasilane, a higher order perhydridosilane, with the purity and volume necessary for use in extensive studies of the chemical vapor deposition (CVD) of epitaxial silicon (e-Si) thin films. The chemical characteristics, thermodynamic properties, and epitaxial film growth of isotetrasilane are compared with those of other perhydridosilanes. A film-growth mechanism distinct from linear perhydridosilanes H(SiH2) nH, where n ≤ 4, is reported. Preliminary findings are summarized for CVD of both unstrained e-Si and strained e-Si doped with germanium (Ge) and carbon (C) employing isotetrasilane as the source precursor at temperatures of 500-550 °C. The results suggest that bis(trihydridosilyl)silylene is the likely deposition intermediate under processing conditions in which gas-phase depletion reactions are not observed.

References

Jun 14, 2012·Chemistry : a European Journal·Wilhelm A EgerNotker Rösch
Jan 24, 2018·Chemical Communications : Chem Comm·J Teichmann, M Wagner

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Citations

Jan 14, 2020·Journal of Materials Chemistry. B, Materials for Biology and Medicine·Francesca GarelloEnzo Terreno

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