Synthesis of carbon nanowalls from a single-source metal-organic precursor

Beilstein Journal of Nanotechnology
André GieseNicolas Wöhrl

Abstract

In this work, the deposition of carbon nanowalls (CNWs) by inductively coupled plasma enhanced chemical vapor deposition (ICP-PECVD) is investigated. The CNWs are electrically conducting and show a large specific surface area, which is a key characteristic to make them interesting for sensors, catalytic applications or energy-storage systems. It was recently discovered that CNW films can be deposited by the use of the single-source metal-organic precursor aluminium acetylacetonate. This precursor is relatively unknown in combination with the ICP-PECVD deposition method in literature and, thus, based on our previous publication is further investigated in this work to better understand the influence of the various deposition parameters on the growth. Silicon, stainless steel, nickel and copper are used as substrate materials. The CNWs deposited are characterized by scanning electron microscopy (SEM), Raman spectroscopy and Auger electron spectroscopy (AES). The combination of bias voltage, the temperature of the substrate and the substrate material had a strong influence on the morphology of the graphitic carbon nanowall structures. With regard to these results, a first growth model for the deposition of CNWs by ICP-PECVD and alu...Continue Reading

References

Oct 16, 2004·Philosophical Transactions. Series A, Mathematical, Physical, and Engineering Sciences·Andrea Carlo Ferrari, John Robertson
Dec 13, 2006·Physical Review Letters·A C FerrariA K Geim
Apr 10, 2008·Small·Yanjie GanFlorian Banhart
Jun 30, 2011·Nanoscale Research Letters·Kehan YuJunhong Chen
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Apr 22, 2018·Journal of Nanoscience and Nanotechnology·Seok Hun KwonHyunil Kang

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Citations

Feb 5, 2019·Micromachines·Neelakandan M SanthoshUroš Cvelbar
Jun 11, 2020·Nanotechnology·Shahzad HussainUroš Cvelbar
Oct 1, 2021·Scientific Reports·Yerassyl YerlanulyAskhat N Jumabekov

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Methods Mentioned

BETA
transmission electron microscopy
scanning
X-ray
Raman spectroscopy
electron spectroscopy

Software Mentioned

ImageJ

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