Synthesis of Large-Area InSe Monolayers by Chemical Vapor Deposition

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Han-Ching ChangChang-Hsiao Chen

Abstract

Recently, 2D materials of indium selenide (InSe) layers have attracted much attention from the scientific community due to their high mobility transport and fascinating physical properties. To date, reports on the synthesis of high-quality and scalable InSe atomic films are limited. Here, a synthesis of InSe atomic layers by vapor phase selenization of In2 O3 in a chemical vapor deposition (CVD) system, resulting in large-area monolayer flakes or thin films, is reported. The atomic films are continuous and uniform over a large area of 1 × 1 cm2 , comprising of primarily InSe monolayers. Spectroscopic and microscopic measurements reveal the highly crystalline nature of the synthesized InSe monolayers. The ion-gel-gated field-effect transistors based on CVD InSe monolayers exhibit n-type channel behaviors, where the field effect electron mobility values can be up to ≈30 cm2 V-1 s-1 along with an on/off current ratio, of >104 at room temperature. In addition, the graphene can serve as a protection layer to prevent the oxidation between InSe and the ambient environment. Meanwhile, the synthesized InSe films can be transferred to arbitrary substrates, enabling the possibility of reassembly of various 2D materials into vertically sta...Continue Reading

References

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Citations

Apr 28, 2020·Nanoscale·Chien-Liang TuChang-Hsiao Chen
May 1, 2020·Journal of Physics. Condensed Matter : an Institute of Physics Journal·Wei KangMiao Zhou
Mar 14, 2019·Nature·Ming-Yang LiLain-Jong Li
Sep 29, 2020·Journal of Physics. Condensed Matter : an Institute of Physics Journal·Donghui WangShi-Jing Gong
Nov 6, 2020·Nanomaterials·Pingping JiangMarie-Christine Record
Mar 9, 2021·Physical Chemistry Chemical Physics : PCCP·Siyan GaoXi Zhang
Mar 16, 2021·Journal of Physics. Condensed Matter : an Institute of Physics Journal·Sasan RostamiTaha Salavati-Fard
Oct 30, 2021·Journal of Physics. Condensed Matter : an Institute of Physics Journal·Hao ChangPing Qian

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