Ten- to 50-nm-long quasi-ballistic carbon nanotube devices obtained without complex lithography

Proceedings of the National Academy of Sciences of the United States of America
Ali JaveyHongjie Dai

Abstract

A simple method combining photolithography and shadow (or angle) evaporation is developed to fabricate single-walled carbon nanotube (SWCNT) devices with tube lengths of approximately 10-50 nm between metal contacts. Large numbers of such short devices are obtained without the need of complex tools such as electron beam lithography. Metallic SWCNTs with lengths of approximately 10 nm, near the mean free path of l(op) approximately 15 nm for optical phonon scattering, exhibit nearly ballistic transport at high biases and can carry unprecedented 100-microA currents per tube. Semiconducting SWCNT field-effect transistors with approximately 50-nm channel lengths are routinely produced to achieve quasi-ballistic operations for molecular transistors. The results demonstrate highly length-scaled and high-performance interconnects and transistors realized with SWCNTs.

References

Oct 6, 2000·Physical Review Letters·Z YaoC Dekker
Aug 9, 2003·Nature·Ali JaveyHongjie Dai
Apr 20, 2004·Physical Review Letters·Ali JaveyHongjie Dai

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Citations

Mar 27, 2012·Nano Letters·Byung Yang LeeSeunghun Hong
Aug 9, 2011·ACS Nano·Yang LiuJian Yu Huang
Feb 14, 2012·ACS Nano·Sung-Jin ChoiYang-Kyu Choi
Dec 1, 2009·Nature Nanotechnology·Chris RutherglenPeter Burke
Feb 8, 2006·Proceedings of the National Academy of Sciences of the United States of America·Yuhuang WangChad A Mirkin
Aug 19, 2015·ACS Nano·Jinshui MiaoChuan Wang
Aug 20, 2005·The Journal of Chemical Physics·Oded HodRoi Baer
Jul 28, 2010·Nanotechnology·J-F DayenB Doudin
Oct 26, 2005·Physical Review Letters·Eric PopHongjie Dai
Sep 24, 2008·Journal of Physics. Condensed Matter : an Institute of Physics Journal·Oded HodEran Rabani
Nov 20, 2012·Advanced Materials·Jie SunXue Duan
Jan 1, 2014·Nano Convergence·Sang Hoon Chae, Young Hee Lee
Nov 18, 2020·Micromachines·Asar AliSalman Qamar
Dec 31, 2005·Physical Review Letters·Michele LazzeriJ Robertson
Feb 21, 2006·Physical Review Letters·Wenping HuKeiichi Torimitsu
Feb 12, 2009·ACS Nano·Oded Hod, Gustavo E Scuseria
Dec 10, 2009·Langmuir : the ACS Journal of Surfaces and Colloids·Hyunseob LimHee Cheul Choi
Jan 26, 2008·Nano Letters·Jaan MännikCees Dekker

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