Jun 24, 2009

The fabrication of periodic metal nanodot arrays through pulsed laser melting induced fragmentation of metal nanogratings

Nanotechnology
Qiangfei Xia, Stephen Y Chou

Abstract

We propose and demonstrate a new method for fabricating periodic arrays of metal nanodots over a large area. In this method, metal nanogratings were first patterned on a substrate by nanoimprint lithography and lift-off, and were then melted using a single excimer laser pulse. We found that the laser melting broke the metal nanogratings into periodic nanodots. Furthermore, we demonstrated the control of the nanodot array pitch using a substrate surface topology, and the fabrication of two-dimensional periodic metal nanodot arrays of 70 nm diameter and 200 nm period. The fragmentation of lines into dots was attributed to the Rayleigh instability in a liquid cylinder.

  • References3
  • Citations7

Mentioned in this Paper

Abnormal Fragmented Structure
Nanostructured Materials
Metal Nanoparticles
Gold
Scanning Electron Microscopy
Anatomy, Regional
Nanotechnology

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