Thermal behavior of perfluoroalkylsiloxane monolayers on the oxidized Si(100) surface

Langmuir : the ACS Journal of Surfaces and Colloids
Joëlle FréchetteCarlo Carraro

Abstract

The thermal stability of perfluoralkylsiloxane monolayers in a vacuum is investigated via X-ray photoelectron spectroscopy (XPS) for temperatures up to 600 degrees C. 1H,1H,2H,2H,-perfluorodecyltrichlorosilane (FDTS) monolayers are deposited on oxidized Si(100) surfaces from the vapor phase with various degrees of surface coverage. Significant monolayer desorption is observed to occur at temperatures below 300 degrees C regardless of the initial monolayer coverage. The desorption mechanism follows first-order kinetics and is independent of the initial coverage. Removal of FDTS is found to occur by the loss of the entire molecular chain, as evidenced by the fact that the CF(3)/CF(2) peak area ratios remain unaffected by the annealing process although CF(n)()/Si peak ratio declines with annealing. This is in sharp contrast to the behavior observed for octadecyltrichlorosilane monolayer for which elevated temperature leads to C-C bond breakage and successive shortening of the alkyl chain. It is also shown that the binding energy and the shape of the F 1s line are good indicators of the degree of disorder in the chain, as well as a measure of the interaction of the chain with the silicon surface.

References

May 1, 2004·Annual Review of Physical Chemistry·Roya Maboudian, Carlo Carraro
Apr 14, 2005·Chemical Reviews·J Christopher LoveGeorge M Whitesides

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Citations

Sep 29, 2011·Langmuir : the ACS Journal of Surfaces and Colloids·Robert J KleinJoseph L Lenhart
May 16, 2014·Langmuir : the ACS Journal of Surfaces and Colloids·Nagendra S BhairamadgiHan Zuilhof
Dec 20, 2012·Langmuir : the ACS Journal of Surfaces and Colloids·Daniele TorresinDimos Poulikakos
Apr 9, 2014·Advanced Materials·Ermanno MieleFrancesco De Angelis
Sep 12, 2015·Langmuir : the ACS Journal of Surfaces and Colloids·Christian PickJoelle Frechette
Jun 15, 2007·Cytometry. Part a : the Journal of the International Society for Analytical Cytology·Yuli WangNancy L Allbritton
Apr 18, 2009·Langmuir : the ACS Journal of Surfaces and Colloids·Yan Xin Zhuang, Ole Hansen
Dec 14, 2012·Langmuir : the ACS Journal of Surfaces and Colloids·Sidharam P PujariHan Zuilhof
Sep 10, 2020·Langmuir : the ACS Journal of Surfaces and Colloids·Dong SongChang-Hwan Choi
Jan 24, 2007·Langmuir : the ACS Journal of Surfaces and Colloids·A FaucheuxJ-N Chazalviel
Sep 6, 2006·Langmuir : the ACS Journal of Surfaces and Colloids·Yuli WangNancy L Allbritton

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