Thermal independent silicon-nitride slot waveguide biosensor with high sensitivity

Optics Express
Xiaoguang TuGuo-Qiang Lo

Abstract

As the sensitivity and detection limit of photonic refractive index (RI) biosensor increases, the temperature dependence becomes a major challenge. In this paper, we present a Mach-Zehnder Interferometer (MZI) biosensor based on silicon nitride slot waveguides. The biosensor is designed for minimal temperature dependence without compromising the performance in terms of sensitivity and detection limit. With air cladding, the measured surface sensitivity and detection limit of MZI biosensor reach 7.16 nm/(ng mm(-2)) and 1.30 (pg mm(-2)), while achieving a low temperature dependence is 5.0 pm/° C. With water cladding, the measured bulk sensitivity and detection limit reach 1730(2π)/RIU and 1.29 × 10(-5) RIU respectively. By utilizing Vernier effect through cascaded MZI structures, the measured sensitivity enhancement factor is 8.38, which results in a surface detection limit of 0.155 (pg mm(-2)).

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Citations

Dec 4, 2012·Sensors·Vittorio M N PassaroFrancesco De Leonardis
Oct 17, 2014·Optics Express·Benedetto TroiaGoran Z Mashanovich
Dec 13, 2019·Scientific Reports·Siddharth NambiarShankar Kumar Selvaraja
Nov 9, 2019·Nanomaterials·Meimei Lai, Gymama Slaughter
May 15, 2015·Optics Express·Weiqiang XieDries Van Thourhout
Oct 21, 2018·Sensors·Enxiao LuanLukas Chrostowski
Apr 13, 2019·Sensors·Abdul ShakoorDavid R S Cumming
Jun 29, 2012·Optics Letters·Biswajeet GuhaMichal Lipson
Aug 9, 2017·Optics Express·Ge GaoJinsong Xia
Apr 3, 2020·Nano Convergence·Yiming MaChengkuo Lee
Sep 15, 2015·Optics Letters·Nikolai N KlimovZeeshan Ahmed
Mar 18, 2021·Optics Express·Thomas GrottkeWolfram H P Pernice
Jun 23, 2021·Optics Express·Xiangpeng OuZhihua Li

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