Thin organosilicon films for integrated optics

Applied Optics
P K TienR J Martin

Abstract

The continued development of integrated optics is heavily dependent upon the availability of materials that are suitable for the construction of thin-film optical circuitry and devices. We report here an investigation of new films made by an rf discharge polymerization process of organic chemical monomers. We concentrate our discussion on films prepared from vinyltrimethylsilane and hexamethyldisilbxane. These films are smooth, tough, pinhole-free, transparent from 0.4 microm to 0.75 microm, and exhibit very low loss (<0.04 dB/cm) for light-wave propagation. More importantly, experiments demonstrate the possibility of controlling the refractive index of the films either by the mixing of the two monomers before deposition or by chemical treatment after the film is deposited. The use of the prism-film coupler for studying the refractive index of each material is discussed in detail.

References

May 1, 1971·Applied Optics·D H HenslerP K Tien
Nov 1, 1971·Applied Optics·P K Tien

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Citations

Nov 1, 1972·Applied Optics·M J Rand, R D Standley
Jul 1, 1974·Applied Optics·J C TracyJ L Merz
Jul 21, 2004·Journal of the Optical Society of America. A, Optics, Image Science, and Vision·Tao Liu, Robert J Samuels
Apr 9, 2005·Applied Optics·John P Lock, Karen K Gleason
Jun 21, 2007·Applied Optics·Ed McKenna, Alan R Mickelson
Dec 1, 1973·Applied Optics·R Ulrich, R Torge
Jun 15, 1979·Applied Optics·H K Pulker
Dec 15, 1983·Applied Optics·M J Ahmed, L Young
Oct 1, 1976·Applied Optics·E Ritter
Feb 14, 2012·ACS Nano·Ioanna SakellariMaria Farsari

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