Ultrahigh-Sensitivity Piezoresistive Pressure Sensors for Detection of Tiny Pressure

ACS Applied Materials & Interfaces
Hongwei LiLiqiang Li

Abstract

High-sensitivity pressure sensors are crucial for the ultrasensitive touch technology and E-skin, especially at the tiny-pressure range below 100 Pa. However, it is highly challenging to substantially promote sensitivity beyond the current level at several to 200 kPa-1 and to improve the detection limit lower than 0.1 Pa, which is significant for the development of pressure sensors toward ultrasensitive and highly precise detection. Here, we develop an efficient strategy to greatly improve the sensitivity near to 2000 kPa-1 using short-channel coplanar device structure and sharp microstructure, which is systematically proposed for the first time and rationalized by the mathematic calculation and analysis. Significantly, benefiting from the ultrahigh sensitivity, the detection limit is improved to be as small as 0.075 Pa. The sensitivity and detection limit are both superior to the current levels and far surpass the function of human skin. Furthermore, the sensor shows fast response time (50 μs), excellent reproducibility and stability, and low power consumption. Remarkably, the sensor shows excellent detection capacity in the tiny-pressure range, including light-emitting diode switching with a pressure of 7 Pa, ringtone (2-20 P...Continue Reading

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Citations

Mar 9, 2021·ACS Applied Materials & Interfaces·Kyubin BaeJongbaeg Kim
Apr 16, 2021·Science and Technology of Advanced Materials·Chi Cuong VuJooyong Kim
Jun 19, 2021·Journal of Colloid and Interface Science·Zhen PeiShengbo Sang
Aug 4, 2021·ACS Applied Materials & Interfaces·Juan ZhuAna C Arias
Dec 31, 2020·ACS Applied Materials & Interfaces·Vitor SencadasGursel Alici
Mar 7, 2020·ACS Applied Materials & Interfaces·Xue-Feng ZhaoHong-Liang Lu
Jul 11, 2019·ACS Applied Materials & Interfaces·Tingting ZhaoJianhua Zhang

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