Ultrasensitive Thin-Film-Based Alx Ga1-x N Piezotronic Strain Sensors via Alloying-Enhanced Piezoelectric Potential

Advanced Materials
Chao-Hung WangChuan-Pu Liu

Abstract

Alx Ga1-x N thin-film-based piezotronic strain sensors with ultrahigh strain sensitivity are fabricated through alloying of AlN with GaN. The strain sensitivity of the ternary compound Alx Ga1-x N is higher than those of the individual binary compounds GaN and AlN. Such a high performance can be attributed to the piezoelectric constant enhancement via intercalation of Al atoms into the GaN matrix, the effect of residual strain, and a suppressed screening effect.

References

May 20, 2006·Nature·Yoshitaka TaniyasuToshiki Makimoto
Apr 7, 2007·Science·Xudong WangZhong Lin Wang
Aug 19, 2008·Nano Letters·Jun ZhouZhong Lin Wang
Mar 30, 2010·Nature Nanotechnology·Sheng XuZhong Lin Wang
Aug 4, 2010·Advanced Materials·Wenzhuo WuZhong Lin Wang
May 12, 2011·Advanced Materials·Yan ZhangZhong Lin Wang
Apr 10, 2012·ACS Nano·Jyh Ming WuZhong Lin Wang
May 3, 2013·Advanced Materials·Xiaonan WenZhong Lin Wang
Apr 5, 2014·ACS Applied Materials & Interfaces·Fei XueZhong Lin Wang

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Citations

Jan 1, 2016·Nanomaterials·Huijie LiShaoyan Yang
Jan 28, 2020·Nanoscale·Mohammad B GhasemianKourosh Kalantar-Zadeh
Aug 5, 2017·Scientific Reports·Chun-Pin HuangKun-Yu Lai

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