Understanding the kinetics and nanoscale morphology of electron-beam-induced deposition via a three-dimensional Monte Carlo simulation: the effects of the precursor molecule and the deposited material

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Daryl A SmithPhilip D Rack

Abstract

The electron-beam-induced deposition of silicon oxide from tetraethyorthosilicate and tungsten from tungsten hexafluoride is simulated via a Monte Carlo simulation. Pseudo one-dimensional nanopillars are grown using comparable electron-beam parameters and a comparison of the vertical and lateral growth rate and the pillar morphology is correlated to the precursor and deposited material parameters. The primary and secondary electrons (type I) are found to dominate the vertical growth rate and the lateral growth rate is dominated by forward and secondary electrons (type II). The resolution and morphology of the nanopillars are affected by the effective electron interaction volume and the resultant surface coverage of the precursor species in the effective electron interaction region. Finally, the simulated results are compared to previously reported experimental results.

Citations

Jul 24, 2013·ACS Applied Materials & Interfaces·Aiden A MartinMilos Toth
Dec 21, 2011·ACS Nano·Harald PlankFerdinand Hofer
Oct 22, 2014·ACS Applied Materials & Interfaces·Aiden A Martin, Milos Toth
Feb 8, 2014·ACS Applied Materials & Interfaces·Robert WinklerHarald Plank
May 4, 2011·Advanced Materials·Katja HöflichSilke Christiansen
Jul 1, 2015·ACS Applied Materials & Interfaces·Michael G StanfordPhilip D Rack
May 18, 2016·ACS Nano·Stephen JesseOlga S Ovchinnikova
Apr 26, 2014·ACS Applied Materials & Interfaces·Georg ArnoldHarald Plank
Nov 6, 2014·ACS Applied Materials & Interfaces·Michael G StanfordPhilip D Rack
Apr 2, 2010·Nanotechnology·Daryl A SmithPhilip D Rack
Oct 16, 2010·Nanotechnology·Ping ChenPaul F A Alkemade
Mar 31, 2015·Beilstein Journal of Nanotechnology·Roland SchmiedHarald Plank
Jul 15, 2015·Beilstein Journal of Nanotechnology·Francesc Salvat-PujolWolfgang S Werner
Dec 25, 2013·Beilstein Journal of Nanotechnology·Francesc Salvat-PujolRoser Valentí
Oct 2, 2015·Beilstein Journal of Nanotechnology·Milos TothIvo Utke
Mar 2, 2013·Nanotechnology·Rajendra TimilsinaPhilip D Rack
Jul 28, 2016·Nanotechnology·Rosa CórdobaBert Koopmans
Nov 28, 2009·Nanotechnology·Yingfeng GuanPhilip D Rack
Dec 2, 2020·Scientific Reports·Pablo de VeraAndrey V Solov'yov

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