Use of Supramolecular Assemblies as Lithographic Resists

Angewandte Chemie
Scott M LewisRichard E P Winpenny

Abstract

A new resist material for electron beam lithography has been created that is based on a supramolecular assembly. Initial studies revealed that with this supramolecular approach, high-resolution structures can be written that show unprecedented selectivity when exposed to etching conditions involving plasmas.

References

Jun 15, 2004·Nature Materials·Markus DeubelCostas M Soukoulis
Nov 21, 2007·Nano Letters·U SchlickumJ V Barth
Sep 23, 2010·Advanced Materials·Zhipeng HuangUlrich Gösele
Apr 21, 2011·Nature Chemistry·Yasuhide InokumaMakoto Fujita
Jun 21, 2011·Nature Materials·M UrdampilletaW Wernsdorfer
Jan 12, 2013·Science·Bartosz LewandowskiDavid A Leigh
Aug 2, 2013·Angewandte Chemie·George F S WhiteheadRichard E P Winpenny
Mar 5, 2015·BMJ Case Reports
Jun 6, 2015·Journal of the American Chemical Society·Jesùs Ferrando-SoriaRichard E P Winpenny
Oct 16, 2015·Angewandte Chemie·Eric J L McInnesRichard E P Winpenny
Jan 9, 2016·Nature Communications·Antonio FernandezRichard E P Winpenny

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Citations

Nov 14, 2018·Scientific Reports·Nguyen Xuan TruongMelissa A Denecke

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