Vibrational-loss EELS and the avoidance of radiation damage

Ultramicroscopy
R F Egerton

Abstract

We discuss vibrational-mode energy-loss spectroscopy using an aloof beam of electrons positioned a small distance b from the edge of a specimen in a probe-forming TEM or STEM equipped with a high-resolution monochromator. Due to the delocalization of inelastic scattering, a strong vibrational-loss signal can be recorded without causing significant damage to a beam-sensitive specimen. Calculations for b=20 nm suggest that damage is reduced by typically a factor of 1000 (relative to electrons of the same energy transmitted through the specimen) for the same signal strength and spatial resolution. About 50% of the vibrational-loss signal comes from material lying within a distance b of the edge of the specimen and extending over a length 2.5b parallel to the edge. Although energy-filtered imaging appears impossible in aloof mode, an undersampling STEM technique is proposed, taking advantage of scattering delocalization to obtain a vibrational-loss image that leaves most of the imaged area undamaged.

References

Jun 22, 2011·Micron : the International Research and Review Journal for Microscopy·R F EgertonM Libera
Oct 10, 2014·Nature·Ondrej L KrivanekPeter A Crozier
Mar 1, 2015·Ultramicroscopy·T AokiP Rez

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Citations

Apr 14, 2016·The Analyst·P Z El-KhouryW P Hess
Mar 30, 2017·ACS Nano·Andrew B YankovichEva Olsson
Aug 1, 2018·Advanced Materials·Jacob R JokisaariRobert F Klie
Sep 2, 2020·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Ray F EgertonPeter A Crozier
Jan 11, 2020·Physical Review Letters·G RadtkeT C Lovejoy
Sep 15, 2020·Science Advances·Renwen Yu, F Javier García de Abajo
Jul 29, 2017·Physical Review Letters·G RadtkeE Balan
Sep 17, 2020·Science Advances·Renwen Yu, F Javier García de Abajo
Jun 27, 2021·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Kartik Venkatraman, Peter A Crozier
Aug 1, 2021·Micron : the International Research and Review Journal for Microscopy·Sercan KeskinNiels de Jonge
Aug 21, 2020·ACS Nano·Johannes BiskupekAndrei N Khlobystov
Sep 4, 2021·Journal of Synchrotron Radiation·Yue ZhangRaimond B G Ravelli

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