Vinyltrimethylsilane (VTMS) as a probe of chemical reactivity of a TiCN diffusion barrier-covered silicon surface

The Journal of Physical Chemistry. B
Laurent Pirolli, Andrew V Teplyakov

Abstract

This paper presents the first molecular level investigation of chemical reactivity of a surface of an amorphous diffusion barrier film deposited on a Si(100)-2 x 1 single crystal. Vinyltrimethylsilane (VTMS) is chosen as a probe molecule because of its chemical properties and because of its role as a ligand in a common copper deposition precursor, hexafluoroacetylacetonato-copper-vinyltrimethylsilane, (hfac)Cu(VTMS). The surface chemistry of vinyltrimethylsilane on titanium carbonitride-covered Si(100)-2 x 1 has been investigated using multiple internal reflection Fourier transform infrared spectroscopy (MIR-FTIR), Auger electron spectroscopy (AES), thermal desorption mass spectrometry, and computational analysis. On a film with nominal surface stoichiometry TiC(x)N(y) (x approximately y approximately 1) preannealed to 800 K, VTMS adsorbs molecularly at cryogenic temperatures even at submonolayer coverages; the major pathway for its temperature-programmed evolution is desorption. Adsorption at room temperature leads to chemisorption via a double-bond attachment. A set of computational models was designed to investigate the possible adsorption sites for a VTMS molecule on a TiCN-covered Si(100)-2 x 1 surface. A comparison of the...Continue Reading

References

Sep 15, 1988·Physical Review A: General Physics·A D Becke
May 1, 2001·Physical Review Letters·K R Paserba, A J Gellman
Jul 21, 2006·The Journal of Physical Chemistry. B·Laurent Pirolli, Andrew V Teplyakov
Jul 21, 2006·The Journal of Physical Chemistry. B·Michael J Watras, Andrew V Teplyakov
Aug 10, 1973·Science·R B Levy, M Boudart

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Citations

Aug 3, 2016·The Journal of Physical Chemistry. C, Nanomaterials and Interfaces·Yichen DuanAndrew V Teplyakov
Sep 12, 2007·Chemistry : a European Journal·Juan Carlos F Rodríguez-Reyes, Andrew V Teplyakov
Apr 17, 2014·Langmuir : the ACS Journal of Surfaces and Colloids·Timothy Miller, Andrew V Teplyakov
Jul 9, 2010·Langmuir : the ACS Journal of Surfaces and Colloids·Kathryn A Perrine, Andrew V Teplyakov

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